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Metal bellows applications
Semiconductor and ultra vacuum bellows
Storage battery
• executor
Cable duct
Groove lifting bellows
Connectors
Coupling (flexibility)
Coupling (torsion)
Conveyor
Air duct
Brake valve
Detector
Hoist
Direction finder
• liquid storage tank / volume compensator
Sensors
Clearance valve
Stem seal
• vibration isolation
Wafer lift welded bellows
Wafer feeder
• XYZ controller
Characteristic：
- to ensure leak proof sealing, leakage rate of 1 were 10 -10 3 cm helium per second.
• the longest product life cycle (standard 1 million cycles)
• tolerable extreme temperature
Low gas efficiency
Corrosion resistance
Design and manufacturing capability
• BELCAXTM (bellows design procedure)
• CAD (Computer Aided Design)
• FEA (finite element analysis)
Solid modeling
• 1001000 and 10000 are fairly large and scalable
Test scope / Reliability Engineering
• product life cycle (indicators of pressure and temperature)
• load / power
• mass spectrometer (MST)
Average effective area
Metallurgy
• pressure (crack, pulse) break
Scanning electron microscope (SEM)
Shock
Spring stiffness
• vibration (random, sinusoidal)
• volume change
welding
Electron beam welding (EBW)
• GTAW
Laser
Plasma arc welding
• rail GTAW
Material Science
• 300 series stainless steel
• AM350 stainless steel • Hastelloy
Alloy C
• Haines alloy 242
Chrome nickel iron alloys 625 and 718
- Titanium